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We summarized The present advancement status of the high-electrical power DUV laser both of those within the wavelength of FHG of the one-μm laser and at 193 nm. The recent development of your good-condition/fiber laser, and also the nonlinear optical crystals, prompts don't just the normal electric power but in addition the beam good quality (coherence) on the DUV lasers to an unprecedented degree.
The standard power of your NIR laser even now has the possible to be enhanced to tens of watts including 70 W [26] In the event the double-go configuration may very well be used for your Yb:YAG SCF amplifier phase. Therefore, Should the conversion performance of 31% from NIR to DUV might be still taken care of at this higher ability ailment, the typical output electrical power with the DUV laser at 258 nm could be a lot more than 20 W, which might be a extraordinary electrical power amount for that DUV laser and lead to the unanticipated DUV laser machining benefits. Additionally, for prime-electric power DUV laser, the UV problems on the nonlinear crystal, such as the windows for CLBO crystal along with the mirrors, is an additional significant parameter for long run and steady Procedure.
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Within the scientific and industrial purposes, the beam high quality of your DUV laser is also a significant parameter. Notably, the beam top quality from the DUV laser significantly influences the laser machining results. The beam excellent of your DUV laser is decided by that of the fundamental laser along with the crystal with the frequency conversion. A short while ago, a large-electrical power DUV laser (>10 W) at 258 nm was described using a beam high-quality of M2 < 1.five, which was produced by FHG of a Yb:YAG laser at 1030 nm utilizing the CLBO crystal [13]. This laser would bring about a much better laser machining end result compared to the past DUV lasers with larger sized M2.
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Furthermore, combining the stable-state laser with other nonlinear approach such as stimulated Raman scattering, NIR lasers could possibly be accomplished at new wavelengths with substantial ability and large beam excellent, which was analyzed by the proof-of-principle experiment. This Raman laser scheme gives a whole new path to the significant-energy DUV laser, Specially with the wavelength of 193 nm.
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The conversion efficiency from essential NIR to DUV is from 5% to 36% in accordance with the noted ends in Table one. Escalating the conversion performance will click here reduce the load on the look and setup of the elemental laser amplifier in addition to the electric powered electrical power intake. A great beam excellent of the fundamental laser will even lead into the growing on the conversion performance as well as the appropriate electrical power intensity on the NIR and inexperienced laser during the SHG and FHG process, respectively. The best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and all around 50%, respectively [12], which corresponds for the conversion effectiveness of 35% from basic to DUV.
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